The 8th International Forum on
Semiconductor Technology

19 - 21 June 2005, The Pan Pacific Hotel Yokohama, Japan

As semiconductor technology has advanced, it has become increasingly difficult to continue scaling the speed of integrated circuits. The 8th International Forum on Semiconductor Technology (IFST 2005), June 19-21, 2005, will focus on addressing this challenge and others facing the global semiconductor industry. IFST 2005 is designed to bring together engineers and scientists from around the world to discuss advances in semiconductor technology and enhance global cooperation in semiconductor research and development.

IFST 2005 is supported by global and regional semiconductor consortia and industry organizations and is co-sponsored by ASET, SEAJ, Selete, SEMI, SIRIJ and STARC.



Agenda Sunday, June 19
18:00-19:00 Welcome Cocktail Reception

Monday, June 20
10:00-10:10 Welcome and Opening Remarks

Masataka Hirose, MIRAI

Session 1 Design Challenges for Manufacturing
chaired by Katsuhiro Shimohigashi, STARC and Dinesh Mehta, SRC

10:10-10:50 Introductory Design Talk

Overview of SoC and SiP Technology for Digital Consumer Electronics

Akira Matsuzawa, Tokyo Institute of Technology
10:50-11:15 Bridging the Gaps between System Level Complexity and Nano-scale Uncertainties

Hugo De Man, IMEC
11:15-11:40 Design Methodologies Toward DFM

Nobuyuki Nishiguchi, STARC
11:40-12:05 Design for Manufacturing: An SRCPerspective

Ralph K. Cavin, III, SRC
12:05-13:35 Lunch
13:35-14:00 Design of Robust IP for Yieldand Time to Market

Paul Simon, Philips Semiconductors
14:00-14:25 Patterning Friendly Design Methdology for 65-nm and Beyond Technology Nodes

Soichi Inoue, Toshiba
14:25-14:50 A Shared Information Framework across Design and Manufacturing; Opportunities, Objectives and Obstacles

Donald R. Cottrell, Si2
14:50-15:10 Break

Session 2:Next Generation Lithography (NGL)
chaired by Akihiko Morino, Selete

15:10-15:50 Introductory Technology Talk

Lithography Roadmap: from ArF Immersion to EUVL
NO.1 NO.2

Luc Van den hove, IMEC
15:50-17:20 Panel Discussion

EUV versus Optical with RET for 45nm and beyond: from Technology to Economics/Cost Perspective

Moderators :

Shinji Okazaki, ASET

Giang Dao, SEMATECH

Panelists :

William H. Arnold, ASML

Naoya Hayashi, Dai Nippon Printing

Naomichi Abe, EUVA

Michael Lercel, IBM

Luc Van den hove, IMEC

Scott Hector, SEMATECH
17:30-19:30 Dinner

Tuesday, June 21
Session 3: Panel Discussion

9:30-11:00 Devices and Technologies for hp32 and beyond

Moderators :

Toshiro Hiramoto, University of Tokyo

James A. Hutchby, SRC

Panelists

Meikei Ieong, IBM

Simon Deleonibus, LETI

Judy L. Hoyt, MIT

Makoto Yoshimi, SOITEC Asia

Kazunari Ishimaru, Toshiba

Summary Hiramoto
11:00-11:15 Break

Session 4: Emerging Research Technologies (from materials to devices)
chaired by Michel Brillouet, Leti

11:15-11:40 Highly Miniaturized System for Biology and Health

Clerc Jean Frederic, CEA
11:40-12:05 The Search for Alternative Logic Devices Beyond CMOS

George Bourianoff, Intel
12:05-12:30 Overview of Future Memory Devices - from Stacked Memory, Gain Memory, SEM to Molecular Memory

Kazuo Nakazato, Nagoya University
12:30-12:35 IFST2006

Michael Polcari, SEMATECH
12:35-12:45 Closing Remarks

Kazuo Miyazawa, ASET



IFST 2005 Committee Member

<IFST 2005 Executive Committee>

Masataka Hirose - MIRAI (Chair)

Toshiaki Masuhara - MIRAI (Vice Chair)

Akihiko Morino - Selete

Dennosuke Uchida - SEMI Japan

Dinesh Mehta - SRC

Gilbert Declerck - IMEC

Hiromi Sakurai - Selete

Katsuhiro Shimohigashi - STARC

Kazuo Miyazawa - ASET

Kenji Maeguchi - SIRIJ

Masanori Kikuchi - SEAJ

Michel Brillouet - CEA/LETI

Michael Polcari - ISMT

Peter Tischer - MEDEA+


<IFST 2005 Program Committee>

Seiichiro Kawamura - MIRAI (Chair)

Masao Kanazawa - ASET

Eijiro Toyoda - STARC

Betsy Weitzman - ISMT

Dieter Gotz - MEDEA+


<IFST 2005 Steering Committee>

Masao Kanazawa - ASET(Chair)

Seiichiro Kawamura - MIRAI

Eijiro Toyoda - STARC

SEMI Japan